SU-8 Mold

In today's modern era of science, microfabrication has emerged as a significantly indispensable field that has found broad applications in numerous areas, for example, including but not limited to MEMS, sensors, micro-optics and microfluidics. At the very core of microfabrication lies the technique of mold lithography, a process that employs a mold for producing microstructures of different shapes and dimensions. In this context, SU-8 photoresist - a material that is extremely versatile, low cost and straightforward in use - has seen a surge of popularity and is now one of the most commonly used materials among the plethora of mold materials available.

Fabrication Process

The fabrication process of SU-8 mold is a highly intricate and sequential process that entails several steps like substrate preparation, photoresist application, exposure, development, and mold transfer.

1. Substrate Preparation

To begin with, the substrate preparation step, which serves as the foundation for the entire process, involves choosing a suitable substrate that can be made of a wide range of materials, such as silicon, glass, or polymer. The substrate is then meticulously cleaned and coated with a thin layer of adhesion promoter, which ensures robust and enduring bonding between the photoresist and the substrate.

2. Photoresist Application

The photoresist application, which is the next step, is an art in itself and is accomplished via several techniques like spin-coating or other methods including dip-coating or spray-coating. Of note, SU-8 is an negative photoresist material, whereby upon exposure to light, the areas that get exposed become less soluble, while the unexposed areas are subsequently eradicated by developing the photoresist layer. Spin speed and duration are adjusted to control the thickness of the photoresist layer.

3. Exposure

The subsequent step that needs careful consideration is exposure, wherein the exposed photoresist layer undergoes ultraviolet light exposure through a mask patterned with the desired features. The exposed areas of the photoresist layer become cross-linked and insoluble, while the unexposed areas remain soluble and are eventually eliminated by developing the photoresist layer using a suitable solvent.

4. Development, and Mold Transfer

Finally, the mold transfer is carried out after the mold has been developed, and the desired pattern has been created. Multiple techniques like hot embossing, microcontact printing, or replica molding are used to transfer the mold to the substrate, which results in the desired pattern. The mold is reusable, making SU-8 mold lithography a highly effective and cost-efficient process for microfabrication.

Our Advantages

• State-of-the-art Equipment and Technologies

Alfa Chemistry, a highly distinguished supplier in the chemical and biological research industry, has established itself as a world-renowned leader in the field of custom synthesis, analytical, and regulatory services, boasting an incomparable team of experts with unrivaled knowledge and expertise in the fabrication process of SU-8 mold lithography.

• Various SU-8 Photoresist Materials

With state-of-the-art equipment and cutting-edge technologies, Alfa Chemistry ensures that each result is of the highest possible quality and easily reproducible. Additionally, Alfa Chemistry provides a diverse range of SU-8 photoresist materials, each with their unique properties and specifications, offering clients the freedom to choose the most suitable material for their requirements.

• Microstructures with High Resolution and Accuracy

Furthermore, SU-8 mold lithography is essential in the fields of microfluidics, MEMS, and optoelectronics, providing noteworthy benefits such as high resolution and accuracy, which allows for the creation of microstructures of unparalleled precision. Without a doubt, Alfa Chemistry stands at the forefront of innovation, delivering remarkable results beyond compare.

• Advanced Lithography Techniques

For even better precision and resolution, our team employs advanced lithography techniques like electron-beam lithography or nanoimprint lithography. These techniques help enhance the resolution and precision of SU-8 mold lithography, facilitating the creation of sub-micron and nanoscale features. Therefore, rest assured, with Alfa Chemistry, you will receive top-quality SU-8 mold lithography services that ensure accuracy, precision, and reproducibility.

What can We Offer

- One-stop fabrication service.
- Customized fabrication according to client requirements
- SU-8 molds of different sizes and geometries, with thicknesses ranging from a few microns to tens of microns.

At Alfa Chemistry, we understand that every project is unique, and we tailor our services to meet the specific requirements of each client. We provide a range of additional services, such as mask design, mold transfer, and quality control, to ensure that our clients receive the best possible results from their projects. Our team of experts has rich experience in the field of SU-8 mode lithography and can provide support and consultation to our customers.

Reference

• Fan, Y.; et al. Rapid and low-cost hot-embossing of polycaprolactone microfluidic devices. Materials Research Express 5.1 (2018): 015305.

Our products and services are for research use only.