SU-8 Developer
SU-8 developer is a chemical solution used in the SU-8 lithography process to dissolve the unexposed photoresist. When the substrate is placed in the developer, the unexposed photoresist is dissolved by the developer. While the exposed photoresist has been crosslinked to form a reticulated polymer, the developer has virtually no dissolving effect on it, forming a microstructured pattern opposite to that of the mask plate.
Alfa Chemistry offers SU-8 developer that is universal for different types of SU-8 photoresists.
Specification
| Item/Catalog | MF-R21 |
| Content of 1-methoxy-2-propyl acetate | 98-100% |
| Appearance | Viscous pale yellow to yellow liquid |
| Odor | Fruity, ester-like |
| Specific gravity | 0.969 |
| Boiling point | 150°C |
| Autoignition temperature | 354°C |
| Explosion limits | Lower: 1.3%; Upper: 13.1% |
| Vapor pressure | 3.7 mm Hg @ 20°C |
| Evaporation rate | 0.39 (BuAc = 1) |
| H2O solubility | Appreciable |
Direction for Use
For different thicknesses of photoresist, refer to the following table to select the development time.
| Photoresist thickness (μm) | Development time (min) | Photoresist thickness (μm) | Development time (min) |
| 0.5-2 | 1 | 100-150 | 10-15 |
| 3-5 | 1 | 160-225 | 15-17 |
| 6-15 | 2-3 | 230-270 | 17-20 |
| 16-25 | 3-4 | 280-550 | 20-30 |
| 26-40 | 4-5 |
Storage and Handling Precautions
Storage: Store in original, well-closed container in a cool dry place.
Handling: Keep away from heat, sparks, and flames.
Avoid breathing vapors.
Use with adequate ventilation.
Avoid contact with skin, eyes, and clothing. Have available safety shower and eyewash.
Wear impervious butyl or nitrile gloves.
Wash with soap and water after handling.
Choose Alfa Chemistry
Alfa Chemistry is your trusted partner in microfluidics, dedicated to the development, manufacture, distribution and application of microfluidic reagents. We utilize our microfluidic expertise to create innovative and high quality products. Our team of highly skilled and experienced scientists and engineers can provide excellent technical support in the use of our products. If you are looking for microfluidic reagents, you can contact us and we will be happy to assist you.
Our products and services are for research use only.
Without the support of our customers, our progress cannot be achieved. If you do not see a specific product
or service or would like to request a quote,
please contact us to inquire with a member from our Sales Team.