Hexamethyldisilazane (HMDS)
For quartz, glass, or silicon wafers with a natural oxide layer, the SiO2 on the surface will form polar -OH bonds on the surface when it is exposed to atmospheric humidity for a long period of time, and the substrate will show hydrophilicity. This hydrophilic surface will show very poor affinity for non-polar or low-polar photoresists, resulting in photoresist detachment. Therefore, tackifiers are needed to improve the hydrophobic properties of the substrate surface.
Hexamethyldisilazane (HMDS) is a commonly used tackifier with the molecular formula (CH3)6Si2NH. The principle of its role is Si(CH3)3 in the Si end of the bond with the substrate, the hydrophilic -OH bond into Si-O bond, and non-polar -CH3 is away from the substrate to form a hydrophobic surface, and photoresist in the molecular group composed of C, H, O to form a stronger force, so as to realize the substrate and photoresist good adhesion.
Specification
| Item/Catalog | MF-R22 |
| CAS NO. | 999-97-3 |
| Molecular weight | 161.39 |
| Appearance | Colorless clear liquid |
| Purity | ≥ 99.8% |
| Flash point | 27 ℃ |
| Refractive index (25 ℃) | 1.406-1.410 |
| Density (25 ℃, g/cm3) | 0.770-0.780 |
| Moisture | ≤ 100 mg/kg |
| Non-volatile content | ≤ 1.5 mg/kg |
Method of Use
1. Evaporation Coating Method
Directly diffuse HMDS in a closed container and then operate. Process at room temperature (20~25 ℃) for 5-10 min, or at high temperature (70-80 ℃) for 5-10min. Since it is a flammable liquid, pay attention to safety when using it at high temperature.
2. Nitrogen Bubbling Method
This method of using HMDS is easy to apply in an integrated production line, where the processing equipment is placed before the photoresist is coated. Process at high temperature (50~70°C) for 40-60s.
3. Rotary Coating Method
HMDS is coated on the wafer using a homogenizing device at 3000~5000rpm/s. Process at 70°C for 1-5min.
Choose Alfa Chemistry
Alfa Chemistry is your trusted partner in microfluidics, dedicated to the development, manufacture, distribution and application of microfluidic reagents. We utilize our microfluidic expertise to create innovative and high quality products. Our team of highly skilled and experienced scientists and engineers can provide excellent technical support in the use of our products. If you are looking for microfluidic reagents, you can contact us and we will be happy to assist you.
Our products and services are for research use only.
Without the support of our customers, our progress cannot be achieved. If you do not see a specific product
or service or would like to request a quote,
please contact us to inquire with a member from our Sales Team.