Mask Aligner
A mask aligner is an instrument that implements photolithography, a microfabrication process used to selectively remove a portion of a film to create a pattern or design on a substrate. To generate this pattern, a photosensitive chemical (photoresist) is first applied to the substrate. The substrate is then introduced into the mask aligner and a mask with the desired pattern is placed on top of the substrate, with the two precisely aligned. The mask is then exposed with high-intensity ultraviolet light to transfer the desired pattern to the substrate.
Alfa Chemistry offers mask aligners that are widely used to generate integrated electronic circuits, specialty photonics materials and microfluidic channels. They can provide higher performance for your process. They are ideal and economical tools for universities and research centers.
Standard Features
- Exposure light source: UV LED
- Wavelength 365 nm (i-line)
- Designed to accommodate wafers of 4" and 6" in diameter
- Single sided exposure system
- Declination angle: ≤ 2°
- Exposure resolution: 2 μm
- Exposure intensity: 20-200 mW/cm2
- Uniformity: ≤ 6%
- Dimensions: 382 (L) x 371 (W) x 435 (H) mm
- Weight: 25 kg
- Work environment: temperature 0 ℃- 40 ℃, relative humidity < 80%
- Long system life-time
Advantages
The mask aligners provided by Alfa Chemistry have the following key advantages:
- They can accommodate wafers and substrates of varying sizes, shapes and thicknesses.
- They can accurately place masks in the same position repeatedly as the chip goes through multiple passes of photolithography.
- They have excellent pattern transfer accuracy and can produce structures with features as low as 250 nm.
Alfa Chemistry is the ideal partner when it comes to integrating instruments or complex microfluidic systems into your solution. We offer a wide range of microfluidic instruments that can be used in many different fields such as biology, chemistry, drug delivery, cosmetics and food. Our team of experienced engineers are able to utilize our instruments to achieve an efficient, precise and cost-effective setup for your microfluidic applications. Please do not hesitate to contact us if you have any requirements.
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